SENSOR HAVING A CANTILEVER

摘要

A sensor comprises a tiny cantilever (14) of a thin film having a detection region at its free end portion, a detector (21) for detecting a displacement of the cantilever (14) caused by material acting on the detecting region, and calculation unit (15) for calculating an amount of the material acting on the detection region, based on the displacement of the cantilever (14) which has been detected by the detector (21), thereby to measure the intensity of a particle-stream applied to the detection region or the thickness of a film formed on the detection region.