| 摘要 |
PURPOSE: A dust removal device and a dust removal system are provided to reduce the time for blowing off foreign materials by removing a pipe between a HEPA filter and a cleaner head. CONSTITUTION: A dust removal device(10) comprises a cleaner head(1) and a filter box(4). The filter box is detachably installed in a compressed air inlet(42) of a casing(1A) of the cleaner head and embedded with a HEPA(High Efficiency Particulate Air) filter(3). A dust removal system includes the dust removal device which is installed in a clean room, an air blower which is installed outside the clean room, and a circulation air pipe which connects the air blower and the dust removal device.
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