发明名称 |
Particle beam systems and methods |
摘要 |
An inspection method comprises focusing a particle beam onto a sample; operating at least one detector located close to the sample; assigning detection signals generated by the at least one detector to different intensity intervals; determining, based on the detection signals assigned to the intensity intervals, at least one first signal component related to electrons incident on the detector; and determining, based on the detection signals assigned to the intensity intervals, at least one second signal component related to X-rays incident on the detector. |
申请公布号 |
EP2282197(A2) |
申请公布日期 |
2011.02.09 |
申请号 |
EP20100008253 |
申请日期 |
2010.08.06 |
申请人 |
CARL ZEISS NTS GMBH |
发明人 |
MANTZ, HUBERT;ARNOLD, RAINER;ALBIEZ, MICHAEL |
分类号 |
G01N23/225;G01N1/32;H01J37/244;H01J37/28;H01J37/305 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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