发明名称 METHOD FOR FABRICATING OF WAFER AND SEMICONDUCTOR DEVICE USING THE WAFER AND METHOD OF MANUFACTURING THE SAME
摘要 PURPOSE: A method for fabricating of a wafer and a semiconductor device using the wafer and a method of manufacturing the same are provided to increase storage capacity by forming the upper part of a conductive pattern of a stepped shape to remove the area in which conductive patterns are overlapped. CONSTITUTION: A wafer(130) is attached to the polishing head while being tiled to one side. The wafer are polished to have an inclination from the edge to center. The center of the wafer is relatively thicker than the edge. A plurality of conductive patterns are formed on the top of the wafer. The conductive pattern comprises at least one among a gate, a contact plug, a bit line, a capacitor, and a metal wiring.
申请公布号 KR20110012451(A) 申请公布日期 2011.02.09
申请号 KR20090070177 申请日期 2009.07.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK, SEONG HO
分类号 H01L21/304 主分类号 H01L21/304
代理机构 代理人
主权项
地址