INTERNAL ANTENNA STRUCTURE AND PLASMA GENERATION APPARATUS

摘要

PURPOSE: An internal antenna assembly and a plasma generating device are provided to compensate for plasma density non-uniformity by a standing wave effect and an electricity storage effect. CONSTITUTION: An antenna(130), which is connected to RF power(150), is inserted into a plasma chamber. An insulation jacket(120) is arranged in the circumference of the antenna. The antenna forms plasma inside the plasma chamber. The antenna and the plasma form a capacitor. The electrostatic capacity per the unit duration of the capacitor is varied according to the longitudinal direction of the antenna. The external diameter of the antenna is varied according to the longitudinal direction of the antenna. The antenna comprises antenna rings(131) having a different external diameter.