BAKING APPARATUS FOR COLOR FILTER

摘要

PURPOSE: An apparatus for baking a color filter is provided to increase thermal efficiency in a chamber. CONSTITUTION: An upper plate(156) and a lower plate(159) cover both sides of the first frame. The first heat insulating material(162) is formed between the upper plate and the lower plate corresponding to the first frame. A supply terminal(167) and a discharge terminal(169) are formed inside the first heat insulating material. The supply terminal and the discharge terminal supply or discharge cooling water. A PCW(Process Cooling Water) pipe(165) is connected between the frame and the lower plate in a zig-zag shape.