| 发明名称 |
Method of suppressing distortion of a working laser beam of a laser link processing system |
| 摘要 |
<p>A method of suppressing distortion of a working laser beam directed for incidence on a target specimen presented for processing by a laser link processing system uses a spatial filter to remove stray light-induced distortion from the working laser beam.</p> |
| 申请公布号 |
GB2442677(B) |
申请公布日期 |
2011.02.09 |
| 申请号 |
GB20080002259 |
申请日期 |
2006.07.11 |
| 申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC |
发明人 |
DAVID M HEMENWAY;BRADY NILSEN;HO WAI LO;KEITH GRANT |
| 分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
