发明名称 METHOD FOR REPAIRING FUSE IN SEMICONDUCTOR DEVICE
摘要 PURPOSE: A method for repairing fuse in a semiconductor device is provided to prevent a problem which is generated in a repair process using a fuse blowing method by cutting a fuse to be repaired through etching. CONSTITUTION: A plurality of fuses(12) are formed on a substrate, and a fuse unit has a fuse box exposing a part of the fuses. A photosensitive pattern(15A), having an open area exposing a part of the fuse to be repaired, is formed. The fuse is etched by photosensitive pattern as a etch barrier. The photosensitive pattern is removed.
申请公布号 KR20110012760(A) 申请公布日期 2011.02.09
申请号 KR20090070616 申请日期 2009.07.31
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KOO, BON SEONG
分类号 H01L21/82;G11C29/04 主分类号 H01L21/82
代理机构 代理人
主权项
地址