发明名称 |
A DEVICE FOR PROCESSING SURFACE SELECTIVELY, AND A NOZZLE AND A COATING APPARATUS FOR FORMING PATTERNS HAVING THE SAME |
摘要 |
PURPOSE: A selective surface treating device, a nozzle thereof, and a coating device thereof are provided to prevent the coating defect by selectively surface-processing a part of region and the remaining regions. CONSTITUTION: A mask(250) is arranged in the lower part of a plasma generating device. The mask comprises a plurality of transmission parts(251) in which the plasma passes through. A plurality of first transmission parts are formed in the first mask. A plurality of second transmission parts are formed in the second mask. A first connector(270) detachably fixes the mask to the plasma generating device.
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申请公布号 |
KR20110011469(A) |
申请公布日期 |
2011.02.08 |
申请号 |
KR20090069142 |
申请日期 |
2009.07.28 |
申请人 |
NARAENANOTECH CORPORATION |
发明人 |
LEE, JIN BEYUNG;SHIN, JUNG HAN |
分类号 |
H01J9/20 |
主分类号 |
H01J9/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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