发明名称 A DEVICE FOR PROCESSING SURFACE SELECTIVELY, AND A NOZZLE AND A COATING APPARATUS FOR FORMING PATTERNS HAVING THE SAME
摘要 PURPOSE: A selective surface treating device, a nozzle thereof, and a coating device thereof are provided to prevent the coating defect by selectively surface-processing a part of region and the remaining regions. CONSTITUTION: A mask(250) is arranged in the lower part of a plasma generating device. The mask comprises a plurality of transmission parts(251) in which the plasma passes through. A plurality of first transmission parts are formed in the first mask. A plurality of second transmission parts are formed in the second mask. A first connector(270) detachably fixes the mask to the plasma generating device.
申请公布号 KR20110011469(A) 申请公布日期 2011.02.08
申请号 KR20090069142 申请日期 2009.07.28
申请人 NARAENANOTECH CORPORATION 发明人 LEE, JIN BEYUNG;SHIN, JUNG HAN
分类号 H01J9/20 主分类号 H01J9/20
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