WASHING DEVICE

摘要

PURPOSE: A cleaning device capable of reducing repairing costs by replacing a first emitting unit of a cleaning plate instead of entire cleaning plate is provided to prevent the leakage of air by fixing a first emitting unit with a screwnut. CONSTITUTION: A cleaning device comprises a roller and a cleaning plate(310). The roller moves a substrate(101) in a specific direction. The cleaning plates are facing one another to wash the substrate using the roller. The upper plate and lower plate are composed of an entry unit, a cleaning unit and an exhausting unit. The upper plate and lower plate are composed of a plurality of blocks.