发明名称 |
MEMS device having a movable electrode |
摘要 |
A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.
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申请公布号 |
US7884431(B2) |
申请公布日期 |
2011.02.08 |
申请号 |
US20100710773 |
申请日期 |
2010.02.23 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
WATANABE TORU;SATO AKIRA;INABA SHOGO;MORI TAKESHI |
分类号 |
H01L27/14;H01L29/82;H01L29/84 |
主分类号 |
H01L27/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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