发明名称 Liquid droplet ejection apparatus and method for manufacturing device
摘要 A liquid droplet ejection apparatus includes an ejection head having an ejection surface with an ejection outlet for ejecting a droplet of a functional liquid, a first container connected to the ejection head via a flow path to form a first space for containing the functional liquid that is to be supplied to the ejection head, a second container for containing the first container to form a second space between the first and the second containers, a pressure regulator for adjusting a pressure of the second space, and a temperature regulator for adjusting a temperature of the functional liquid of the first container, at least a part of the first container being made of a film deformed in accordance with an operation of the pressure regulator.
申请公布号 US7883170(B2) 申请公布日期 2011.02.08
申请号 US20070964851 申请日期 2007.12.27
申请人 SEIKO EPSON CORPORATION 发明人 TOYODA NAOYUKI;MIKOSHIBA TASHIAKI;KOBAYASHI TOSHIYUKI
分类号 B41J29/38 主分类号 B41J29/38
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