| 摘要 |
A tool moving device with a linear motor is provided with a movable body which is movable bodily with a tool on a support frame through a pair of fluid bearings. A plurality of magnet constructs are circumferentially arranged on the movable body to respectively face stationary coils secured to the support frame. Each of the magnet constructs comprises at least one pair of magnet members juxtaposed in the moving direction of the magnet yoke and arranged with their polarities of magnet pole being opposite to each other, wherein respective pairs of the magnet members attached to the circumferential surface form first and second rows spaced from each other in the moving direction of the magnet yoke. Each magnet member in each of the first and second rows is arranged to be opposite in polarity of magnet pole to each of the magnet members next thereto in the circumferential direction.
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