发明名称 Atom probes, atom probe specimens, and associated methods
摘要 The present invention relates generally to atom probes, atom probe specimens, and associated methods. For example, certain aspects are directed toward methods for analyzing a portion of a specimen that includes selecting a region of interest and moving a portion of material in a border region proximate to the region of interest so that at least a portion of the region of interest protrudes relative to at least a portion of the border region. The method further includes analyzing a portion of the region of interest. Other aspects of the invention are directed toward a method for applying photonic energy in an atom probe process by passing photonic energy through a lens system separated from a photonic device and spaced apart from the photonic device. Yet other aspects of the invention are directed toward a method for reflecting photonic energy off an outer surface of an electrode onto a specimen.
申请公布号 US7884323(B2) 申请公布日期 2011.02.08
申请号 US20060064020 申请日期 2006.08.15
申请人 CAMECA INSTRUMENTS, INC. 发明人 KELLY THOMAS F.;BUNTON JOSEPH H.;WIENER SCOTT A.
分类号 G01N23/00 主分类号 G01N23/00
代理机构 代理人
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