发明名称 Integration of capacitive elements in the form of perovskite ceramic
摘要 The use of a conductive bidimensional perovskite as an interface between a silicon, metal, or amorphous oxide substrate and an insulating perovskite deposited by epitaxy, as well as an integrated circuit and its manufacturing process comprising a layer of an insulating perovskite deposited by epitaxy to form the dielectric of capacitive elements having at least an electrode formed of a conductive bidimensional perovskite forming an interface between said dielectric and an underlying silicon, metal, or amorphous oxide substrate.
申请公布号 US7883906(B2) 申请公布日期 2011.02.08
申请号 US20100716289 申请日期 2010.03.03
申请人 STMICROELECTRONICS S.A.;UNIVERSITE FRANCOIS RABELAIS 发明人 GOUX LUDOVIC;GERVAIS MONIQUE
分类号 H01L29/72 主分类号 H01L29/72
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