发明名称 Method and apparatus to sort nanotubes
摘要 Methods and systems for sorting nanostructures, such as nanodot or nanotubes, are described. The sorting of the nanostructures removes remnants of the nanotube fabrication from the mixture or bundle of material. The sorting includes suspending the mixture in a plasma, which separated the nanostructures and remnant material. A motive force, such as gas flow or laser, is applied to the suspended nanostructures and remnants such that the larger material moves out of the plasma while the smaller material remains trapped in the plasma.
申请公布号 US7883927(B2) 申请公布日期 2011.02.08
申请号 US20050217095 申请日期 2005.08.31
申请人 MICRON TECHNOLOGY, INC. 发明人 SUBRAMANIAN KRUPAKAR M.
分类号 H01L21/00;H01L21/31;H01L21/469 主分类号 H01L21/00
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