WAFER PROBER FOR SEMICONDUCTOR INSPECTION AND INSPECTION METHOD

摘要

PURPOSE: A wafer prober for inspecting a semiconductor and a method for inspecting the semiconductor using the same are provided to improve the workability by increasing the number of arranged contact units. CONSTITUTION: A tray(3) supports a wafer(2) at the set position and transfers the wafer to the target position. An alignment unit(4) aligns the wafer at the set position. The number of contact units(5) is more than the number of alignment units. A contact unit inspects the wafer by being in contact with the wafer. A tray transferring module(6) transfers the tray between the alignment units and the contact units.