| 摘要 |
PURPOSE: A substrate buffer cassette is provided to prevent a substrate from being damaged or bent by placing the substrate to a longitudinal direction along the transferring direction. CONSTITUTION: A substrate buffer cassette comprises a top plate(110), a base plate(120), a side frame, and a middle frame(140). The top plate is formed in the form of the plate shape rectangular parallelepiped having a pair of long axis sides(122) and pair of uniaxial sides(121). The base plate has the counter surface which is separated from the top plate which faces the base plate. The base plate is formed into the same form as the top plate. The side frame is formed into the square columnar shape on the opposite surface toward the vertical direction.
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