| 摘要 |
PURPOSE: A vacuum gate valve for heating is provided to prevent malfunction of a sealing member by installing a heating unit around a connection section of a driving body and a valve body. CONSTITUTION: A sealing member(32) opens and closes a sliding space by ascending and descending in parallel to a fluid path. A heating unit is comprised of an upper heating unit(51) and a lower heating unit(52). The heating unit is formed with a ring shape to be constantly separated from the inner surface of the path. The upper heating unit heats the circumference of the connection section of the driving body. The lower heating unit heats the circumference of the connection section of the valve body.
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