TELLURIUM PRECURSORS FOR GST FILMS IN AN ALD OR CVD PROCESS,申请号KR20080118113-传众专利搜索

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发明名称	TELLURIUM PRECURSORS FOR GST FILMS IN AN ALD OR CVD PROCESS
摘要
申请公布号	KR101012921(B1)	申请公布日期	2011.02.08
申请号	KR20080118113	申请日期	2008.11.26
申请人		发明人
分类号	C07F11/00;C07F7/08	主分类号	C07F11/00
代理机构		代理人
主权项
地址

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