发明名称 Method of fabricating oxide semiconductor device
摘要 A method for fabricating a device using an oxide semiconductor, including a process of forming the oxide semiconductor on a substrate and a process of changing the conductivity of the oxide semiconductor by irradiating a predetermined region thereof with an energy ray.
申请公布号 US7883934(B2) 申请公布日期 2011.02.08
申请号 US20100708601 申请日期 2010.02.19
申请人 CANON KABUSHIKI KAISHA 发明人 KAJI NOBUYUKI;YABUTA HISATO
分类号 H01L21/423 主分类号 H01L21/423
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