BORON-CONTAINING HYDROGEN SILSESQUIOXANE POLYMER, INTEGRATED CIRCUIT DEVICE FORMED USING THE SAME, AND ASSOCIATED METHODS

摘要

PURPOSE: A boron-containing hydrogen silsesquioxane polymer is provided to form insulating structures while removing or reducing the discharge of undesirable by-products. CONSTITUTION: A composition comprises a boron-containing hydrogen silsesquioxane polymer having a structure that includes silicon-oxygen-silicon units and oxygen-boron-oxygen linkages in which the boron is a trivalent, wherein two silicon-oxygen-silicon units are covalently bound by an oxygen-boron-oxygen linkage therebetween. The boron is present in the boron-containing hydrogen silsesquioxane polymer in an amount of approximately 0.5 to 5 mol %.