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经营范围
发明名称
A method for coating, an apparatus for coating and a method for manufacturing a photo mask blank
摘要
申请公布号
KR101012552(B1)
申请公布日期
2011.02.07
申请号
KR20060031449
申请日期
2006.04.06
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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