CLEANING PAD FOR TEST PROBE AND METHOD OF CLEANING TEST PROBE

摘要

Disclosed is a cleaning pad for removing matter stuck to the tip of a test probe used to inspect an electronic circuit. The aforementioned cleaning pad is provided with an abrasive layer (42) which contains a soft base and a fine abrasive agent mixed therein and into which the tip of the test probe is permitted to penetrate and with a surface layer (44) which consists of polymer gel and is laminated on at least one of the surfaces of this abrasive layer (42). The tips of test probes (16, 18) are made to penetrate through the surface layer (44) into the abrasive layer (42), thereby performing cleaning. Even if changes are made in the shapes of the tips of the test probes, changes in penetration resistance can be made small, with the result that variations in the amounts of penetration into the abrasive layer(42) (cleaner layer) are made low, thereby cleaning all test probes in a uniform manner cleaning all test probes in a uniform manner. Furthermore, stuck matter capturing action on the surface is increased, thereby permitting enhancement of test reliability and improvement of product yields.