| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection apparatus capable of rapidly and accurately determining the quality of the mounting state of the electronic parts mounted on the peripheral edge part of a panel substrate and capable of easily corresponding, even in scaling-up of a panel. SOLUTION: The substrate inspection apparatus is equipped with a moving stage 1 for moving the transparent panel substrate 10 (work W), which has the electronic parts mounted thereon via an anisotropic conductive film, to a predetermined inspection position to position the same, an imaging means 2 for imaging an inspection target region through the substrate 10, from the rear side of the surface having the electronic parts mounted thereon; a linear drive means 3 for sliding the imaging means 2 along the inspection target region; and an information processing means for determining the quality of the mounting state of the imaged inspection target region and places the substrate 10 on the upper surface 1a of the moving stage 1, in a state where at least one of the end parts of the substrate protrudes laterally. In this substrate inspection apparatus, a fixing stage 4 for supporting the end part of the substrate 10 protruding from the moving stage 1 from below is arranged in the vicinity of the imaging means 2. COPYRIGHT: (C)2011,JPO&INPIT |
