| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic recording medium which suppresses film thickness distribution of process dust and a nonmagnetic material by preventing a damage onto the side wall of a magnetic pattern. SOLUTION: The magnetic recording medium comprises protruding magnetic patterns formed on a substrate, and a nonmagnetic material which is embedded in the recesses between the magnetic patterns and has a higher oxygen atom concentration on the surface side than on the substrate side. In the magnetic recording medium, a plurality of nonmagnetic material layers each having a higher oxygen atom concentration on the surface side than on the substrate side are embedded, in the recesses between the magnetic patterns. COPYRIGHT: (C)2011,JPO&INPIT
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