发明名称 |
ASSEMBLY METHOD OF TRANSFER MECHANISM AND TRANSFER CHAMBER |
摘要 |
An assembly method is capable of assembling a transfer mechanism which transfers a target and includes a pick unit for holding the target, a slide unit for sliding the pick unit and a drive unit for driving the slide unit. The assembly method includes installing a lifting mechanism for lifting the units at a ceiling portion of a transfer chamber where the transfer mechanism is accommodated; and assembling the units loaded into the transfer chamber inside the transfer chamber by using the lifting mechanism.
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申请公布号 |
US2011027058(A1) |
申请公布日期 |
2011.02.03 |
申请号 |
US20100847320 |
申请日期 |
2010.07.30 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
YAMADA YOUHEI;KAI YOSHIHIRO |
分类号 |
B25J21/00;B23P19/00;B25J11/00 |
主分类号 |
B25J21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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