METHOD AND SYSTEM FOR DETECTING AND CLASSIFYING DEFECTS OF SUBSTRATE

摘要

A method and a system for detecting and classifying defects of a substrate are provided. The system includes: a first channel, including a first illuminating unit (210) adapted to irradiate light to a transparent or semi-transparent substrate (260) and a first imaging unit (220) adapted to take images by sensing light from the substrate (260) when the first illuminating unit (210) irradiates the light to the substrate (260); a second channel, including a second illuminating unit (210) adapted to irradiate light to the substrate (260) and a second imaging unit (230) adapted to take images by sensing light from the substrate (260) when the second illuminating unit (210) irradiates the light to the substrate (260); an image construction module (240), adapted to construct two images of the substrate (260) by using the image taken by the first imaging unit (220) and the image taken by the second imaging unit (230) respectively; and an image processing module (250), adapted to detect, when the substrate (260) has a defect, whether the defect is on the substrate (260) or in the substrate (260), based on the relationship of positions where the defect of the substrate (260) appears in the two images of the substrate (260). By using the method and the system, whether the transparent or semi-transparent substrate (260) has a defect can be detected and classified.