| 摘要 |
<p>A probe card holding apparatus (60) arranged on a prober (40) so as to hold a probe card (20) is provided with: a clamp mechanism (80) which clamps a clamp head (24) formed on the probe card (20); a clamp bar (70) arranged on the prober (40), over an opening (42) into which the probe card (20) is to be inserted; and a lifting device (90) arranged on the clamp bar (70) to bring up/down the clamp mechanism (80).</p> |
