发明名称 POLISHING TOOL SUITABLE FOR PAD CONDITIONING, AND POLISHING METHOD USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a tool for conditioning which is easy to control a process and capable of improving a tool service life. <P>SOLUTION: (1) A polishing tool includes a rigid substrate having a planar circular surface and a plurality of cutting edges 1 having a flat top face located within a constant level with respect to the circular surface fixedly disposed on the substrate. The top face 6 is surrounded by a plurality of linear ridges and is adjacent to a side face extending in a direction of a tool axis via the ridge, and at least the summit of the cutting edge is formed of sintered diamond. (2) A polishing method for removing a workpiece material using the polishing tool includes the steps of: pressing the cutting edge against the surface of the workpiece, thereby causing a deforming area displaced in the pressed direction on the surface of the workpiece; and removing the workpiece material at a border between the deforming area and a remaining area by further causing the linear ridge on the top of the cutting edge to relatively move from the deforming area. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011020182(A) 申请公布日期 2011.02.03
申请号 JP20090164566 申请日期 2009.07.13
申请人 SHINGIJUTSU KAIHATSU KK 发明人 ISHIZUKA HIROSHI
分类号 B24B53/12;B24B53/02;B24D3/00;B24D7/06 主分类号 B24B53/12
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