| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus which measures an object under measurement with high precision. SOLUTION: An inclined rotating table 14 of the measuring apparatus 11 includes a rotating table 21 on which the object under measurement is mounted and which is rotatingly driven about a rotating shaft L1 and an inclined table 22 to which the rotating table 21 is rotatably mounted and is driven in an inclined manner about an inclined shaft L2 extending horizontally. The inclined rotating table 14 includes displacement sensors 31 to 33 for measuring the displacement of the rotating table 21 with respect to the inclined table 22, and a displacement sensor 34 for measuring the vertical displacement of the inclined table. The present invention can be applied to, for example, a measuring apparatus having an inclined rotating table. COPYRIGHT: (C)2011,JPO&INPIT
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