| 摘要 |
PROBLEM TO BE SOLVED: To provide a varactor capable of sufficiently shortening a distance between a movable electrode and a fixed electrode, even if the movable electrode warps. SOLUTION: Each fixed electrode 10 of the varactor 1 is disposed in a region facing a circle C inscribed with a square of the movable electrode 8 on an upper surface 2A of a substrate 2, and the fixed electrode 10 is not disposed in a region facing each vertex 8A of the movable electrode 8. In addition, an extraction electrode 11 connected with the fixed electrode 10 is disposed to cross a center of one of sides of the square of the movable electrode 8 in a plan view. COPYRIGHT: (C)2011,JPO&INPIT
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