发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device operating at a high speed while having a resistive element of small variation in a value of resistance and excellent in characteristics, and also to provide a method for manufacturing the semiconductor device. SOLUTION: The semiconductor device is equipped with: an element isolation region 12 formed in a semiconductor substrate 11; a first active region 13A; a second active region 13B; a first conductivity type MIS transistor formed on the first active region 13A and having a first conductivity type gate electrode 16A comprising silicon in which a first conductivity type impurity is introduced; a second conductivity type MIS transistor formed on the second active region 13B and having a second conductivity type gate electrode 16B comprising silicon in which a second conductivity type impurity is introduced; and a p-type resistor 16D formed on the element isolation region 12, comprising silicon in which a p-type impurity is introduced, and having a value of resistance larger than those of the n-type gate electrode 16A and the p-type gate electrode 16B. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011023452(A) 申请公布日期 2011.02.03
申请号 JP20090165480 申请日期 2009.07.14
申请人 PANASONIC CORP 发明人 KUTSUNAI TOMOE;ITO OSAMU
分类号 H01L27/06;H01L21/822;H01L21/8234;H01L27/04 主分类号 H01L27/06
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