| 摘要 |
PROBLEM TO BE SOLVED: To obtain a wavelength conversion type light source capable of generating harmonic wave output with good beam quality. SOLUTION: The wavelength conversion type light source includes: a fundamental wave light source 11; a wavelength conversion element 1 converting the wavelength of a fundamental wave 2 into harmonic waves when the fundamental wave 2 from the fundamental wave light source 11 enters; and wavefront conversion elements 13, 53, 61 converting a wavefront of the fundamental waves 2 prior to entering the wavelength conversion element 1 into a plurality of wavefronts which differ from one another in at least one of phases and propagation vectors. The wavelength conversion type light source may include a single or a plurality of wavelength selection mirrors 84a to 84d, 51, 52. The wavelength selection mirrors 84a to 84d, 51, 52 transmit harmonic waves that have been converted by the wavelength conversion element 1 and transmitted through the wavelength conversion element 1, and reflects the fundamental wave that has not been converted by the wavelength conversion element 1 but transmitted through the wavelength conversion element 1, to allow the fundamental wave to be again transmitted through the wavelength conversion element 1. COPYRIGHT: (C)2011,JPO&INPIT |
