发明名称 |
Liquid vaporizer-feeder |
摘要 |
A liquid vaporizer-feeder has a unitary housing structure for both a control valve for controlling the amount of a liquid passing therethrough and a vaporization valve for causing the liquid from the control valve to be vaporized and transported out by a carrier gas. The housing structure has a throughhole through which the two valves are connected. The throughhole is short and narrow, and has a portion made even narrower such that the pressure in the liquid passing therethrough is increased, preventing bubbles from forming in the throughhole. As a result, vaporized liquid can be supplied at a steadier rate, for example, to a reaction chamber.
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申请公布号 |
US5272880(A) |
申请公布日期 |
1993.12.28 |
申请号 |
US19920822179 |
申请日期 |
1992.01.16 |
申请人 |
APPLIED MATERIALS, INC.;LINTEC CO., LTD. |
发明人 |
NISHIZATO, HIROSHI;ONO, HIROFUMI |
分类号 |
C23C16/44;B01F3/02;B01J3/02;C23C16/448;C23C16/455;H01L21/205;H01L21/31;(IPC1-7):F17C13/00 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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