VIBRATION GYROSCOPE USING PIEZOELECTRIC FILM

摘要

One vibration gyroscope comprises: a ring-shaped vibration body (11) equipped with a uniform plane; a leg portion (15) for flexibly supporting the ring-shaped vibration body; and a plurality of electrodes (13a, 13b, ..., 13h) disposed on or above the plane of the ring-shaped vibration body and formed by one of an upper metal film and a lower metal film disposed mutually opposite sides of a piezoelectric film in the thickness direction thereof. When one electrode (13a) serving as a driving electrode for exciting a primary vibration of the ring-shaped vibration body (11) in a cosN? vibration mode is set as a reference driving electrode, the other electrodes (13b, ..., 13h) are placed at specific positions. With this placement, the vibration gyroscope detects a secondary vibration including an out-of-plane vibration mode, and a voltage for suppressing this secondary vibration is applied to a suppressing electrode (13j).