发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor device having a structure which enables sufficient reduction in parasitic capacitance is provided. In addition, the operation speed of thin film transistors in a driver circuit is improved. In a bottom-gate thin film transistor in which an oxide insulating layer is in contact with a channel formation region in an oxide semiconductor layer, a source electrode layer and a drain electrode layer are formed in such a manner that they do not overlap with a gate electrode layer. Thus, the distance between the gate electrode layer and the source electrode layer and between the gate electrode layer and the drain electrode layer are increased; accordingly, parasitic capacitance can be reduced.
申请公布号 WO2011013502(A1) 申请公布日期 2011.02.03
申请号 WO2010JP61734 申请日期 2010.07.06
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD.;YAMAZAKI, SHUNPEI;TSUBUKU, MASASHI;AKIMOTO, KENGO;HOSOBA, MIYUKI;SAKATA, JUNICHIRO 发明人 YAMAZAKI, SHUNPEI;TSUBUKU, MASASHI;AKIMOTO, KENGO;HOSOBA, MIYUKI;SAKATA, JUNICHIRO
分类号 H01L29/786;G02F1/1368;H01L21/28;H01L21/336;H01L29/417;H01L51/50 主分类号 H01L29/786
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