发明名称 |
Process and Method for a Decoupled Multi-Parameter Run-to-Run Controller |
摘要 |
A manufacturing process including a controller method to generate a tool setting which includes a tool offset and a device offset. The controller method uses a device parameter measurement to update the tool offset and device offset. A tool weight and a device weight is assigned so that only one of the tool offset and device offset is significantly changed during the update. The process may be applied to semiconductor device manufacturing and particularly to integrated circuit fabrication.
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申请公布号 |
US2011029119(A1) |
申请公布日期 |
2011.02.03 |
申请号 |
US20090511370 |
申请日期 |
2009.07.29 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
RAMAVAJJALA MADHU SUDAN;BUSHMAN KRISTI;SPANGLER ROBERT RAY;MEISNER STEPHEN ARLON;ROTH RONALD CHARLES |
分类号 |
G06F19/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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