METHOD OF MAKING AND APPARATUS HAVING WINDOWLESS POLISHING PAD AND PROTECTED FIBER
摘要
A polishing system includes a polishing pad with an aperture that extends through all layers of the polishing pad and a light transmissive film positioned on top of a light-generating or light-guiding element of an optical monitoring system.
申请公布号
WO2010126901(A3)
申请公布日期
2011.02.03
申请号
WO2010US32607
申请日期
2010.04.27
申请人
APPLIED MATERIALS, INC.;ZHANG, JIMIN;DUBOUST, ALAIN;BENNETT, DOYLE E.
