| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To curtail the capacity of an output buffer and a memory, and to shorten transfer time of data. <P>SOLUTION: In a charged particle beam drawing device 10 in which a pattern corresponding to a figure included in drawing data is drawn on a sample M by a charged particle beam 10a1b, strip-shaped stripe frames STR1 or the like on the sample M are divided into a plurality of block frames DPB11, DPB12 or the like, the block frames DPB11 and DPB12 adjacent to each other of the plurality of block frames DPB11, DPB12 or the like in the stripe frames STR1 or the like are collected, thereby constituting a virtual block frame VDPB11, and data DVDPB11 corresponding to the virtual block frame VDPB11 is read out from an input buffer 10b1b by an input data dividing module 10b1d, stored in an output buffer 10b1d1, and transferred from an output buffer 10b1d1 to a shared memory 10b1e12 of converters 10b1e1 and 10b1e2. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
