| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a drawing device, a program, and a drawing method for detecting each of positions of two kinds or more of reference marks on the same substrate and applying amount of correction obtained from the result of detection of the same kind of reference marks to different kinds of reference marks to evaluate the amount of correction to detect the errors having the same tendency easily and correct them properly. <P>SOLUTION: This drawing device corrects a set position of the first reference mark by the amount of first correction obtained based on the first reference mark, computes error (amount of first deviation) from the detected position being the position after the correction, corrects a set position of the second reference mark by the amount of second correction obtained based on the second reference mark, computes error (amount of second deviation) from the detected position being the position after the correction, corrects a set position of the second reference mark by the amount of first correction, computes error (amount of third deviation) from the detected position being the position after the correction, corrects the set position of the first reference mark by the amount of second correction, and computes error (amount of fourth deviation) from the detected position being the position after the correction. <P>COPYRIGHT: (C)2011,JPO&INPIT |
