| 摘要 |
PROBLEM TO BE SOLVED: To measure magnetic field of two axial directions with almost the same sensitivity and reduce measurement time. SOLUTION: A loop antenna 3 of a magnetic field probe 1 is composed of a first loop pattern 10 provided in parallel to a surface of a multilayer substrate 5, and a second loop pattern 15 provided in parallel to a thickness direction of the multilayer substrate 5. The first loop pattern 10 is formed of square U shaped loop patterns 11 and 12 that are arranged at an intermediate position in the thickness direction of the multilayer substrate 5. Moreover, the second loop pattern 15 is connected between the square U shaped loop patterns 11 and 12 in series to form one conductor line CL. The first and second loop patterns 10 and 15 have a rotationally symmetric shape about a center axis O. COPYRIGHT: (C)2011,JPO&INPIT
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