| 摘要 |
PROBLEM TO BE SOLVED: To provide a spectroscopic three-dimensional shape measuring instrument for measuring the three-dimensional shape of a measurement object and spectral information, while limiting a data amount necessary for measurement, and to oprovide a method of measuring a spectroscopic three-dimensional shape. SOLUTION: The spectroscopic three-dimensional shape measuring instrument 1 includes an interferometer 2, causing white interference fringes to arise with respect to measurement light which is reflected or scattered by the white-illuminated measuring object; a point detector 5 for measuring the intensity of light output from the interferometer 2; and a controller 6, connected to the point detector 5 to find the three-dimensional shape of the measuring object and spectral information from a white interference fringe signal. While the positional relation between the interferometer 2 and the measuring object 10 is varied, the controller 6 finds cross spectral density representing spectral information at a prescribed point of the measuring object by frequency-converting, as to the optical path difference, three-dimensional white interference fringes acquired by changing an optical path difference between two light fluxes with the measurement light divided thereinto in the interferometer 2. The controller determines the wave front of the light from the prescribed point on the measuring object by frequency-converting the spectral density as to the travel of the interferometer 2. COPYRIGHT: (C)2011,JPO&INPIT |
