发明名称 METHOD OF PRODUCING MAGNESIUM FLUORIDE COATING, ANTIREFLECTION COATING, AND OPTICAL ELEMENT
摘要 A method of producing a magnesium fluoride coating includes a step of forming a coating by applying a solution containing a fluorine-containing organic magnesium compound represented by the following formula to a base and a step of heat-treating the coating while the coating is being irradiated with a beam of light with a wavelength of 246 nm or less: Mg(CF3—X—COO)2  (1) wherein X represents a single bond or one of—(CF2)n—,—(CH2)m—, and—CH2CF2—that may have a substituent, where n and m each represent an integer of 1 to 4. The temperature of the heat-treating step can be 250° C. or lower. The coating can be irradiated with a beam of light with a wavelength of 185 nm or less.
申请公布号 US2011027577(A1) 申请公布日期 2011.02.03
申请号 US20100843687 申请日期 2010.07.26
申请人 CANON KABUSHIKI KAISHA 发明人 TANAKA HIROYUKI;KOBAYASHI MOTOKAZU;SAKAKIBARA TEIGO
分类号 B05D3/06;B32B9/00 主分类号 B05D3/06
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