| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a dust collecting/discharging apparatus for laser beam machining that moves in conjunction with the movement of an optical system and that highly accurately discharges dust even if the moving speed of the dust collecting/discharging apparatus is high. <P>SOLUTION: The apparatus includes a dust collection body 30 including: a side wall section 12 that surrounds a laser beam machining part; an upper wall section 11 that hermetically shields an upper opening of the side wall section 12 and that has a window 14 for transmitting a laser beam; and a bottom section 13 that has an opening 16 in a position opposite to the machining part of a planar workpiece 41. The apparatus further includes: a sucking/discharging means that sucks dust from the opening 16 installed in the bottom section 13 of the dust collection body 30 and that discharges dust from a discharge port 15 installed in the side wall section 12 of the dust collection body 30; an air curtain forming means that jets air from the periphery of the opening 16 of the bottom section 13 of the dust collection body 30 and that forms an air curtain 18 in an area between the bottom section 13 and the planar workpiece 41; and an outer peripheral wall 19 that surrounds the air curtain 18. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
