| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment apparatus such as a high temperature furnace, which is free from causing failure in automatic conveyance, even without using a complicate position detecting mechanism as a countermeasure for the case that the conveyance is disabled when the sum of variations in relative positions of irregular shapes due to temperature change and variations in relative positions due to mechanism stopping accuracy etc. is greater than the clearance of a fitting part. SOLUTION: First, only an insertion hole and an insertion protrusion are fitted with a shallow fitting depth at a location having sufficient clearance, and next, the insertion hole and the insertion protrusion are moved relatively in the planer direction, so that the side surfaces of the insertion protrusion and the insertion hole are brought into contact with each other at a position where the insertion hole and the insertion protrusion can fit, and also a positioning hole and a positioning protrusion can fit, and then the protrusions are inserted more deeply so that the positioning hole and the positioning protrusion are also fitted. This can stabilize the relative positions of the protrusions and the holes after positioning, regardless of the temperature of the apparatus during conveyance, achieving higher accurate positioning. COPYRIGHT: (C)2011,JPO&INPIT |
