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发明名称
BOAT ROTATING EQUIPMENT IN LOADLOCK CHAMBER
摘要
申请公布号
JPH06252243(A)
申请公布日期
1994.09.09
申请号
JP19930057689
申请日期
1993.02.23
申请人
KOKUSAI ELECTRIC CO LTD
发明人
TAKAHASHI NOBUHARU
分类号
C23C14/56;C23C14/50;H01L21/22;H01L21/31;H01L21/324;H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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