发明名称 POLISHING METHOD
摘要 PROBLEM TO BE SOLVED: To prevent the occurrence of a recess in the rotation center of a workpiece. SOLUTION: The polishing method is used to polish a workpiece such that a polishing tool press-contacts the workpiece having an aspheric surface while it is being rotated, and scans the work piece along a scanning line passing its rotation center. In this method, at first, a shape to be removed per unit time of the tool is acquired with the use of a dummy workpiece, a tool remaining time distribution is calculated based on a target shape to be removed and the unit time removing shape of the tool, and a scanning speed of the tool is controlled. The dummy workpiece has an spherical surface having the same curvature radius as that of rotation center of the workpiece, and through the polishing of the spherical surface, the removing shape per unit time of the tool is acquired. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011020241(A) 申请公布日期 2011.02.03
申请号 JP20090169899 申请日期 2009.07.21
申请人 CANON INC 发明人 ANRAKU YOICHIRO
分类号 B24B49/02;B24B13/00;B24B49/10 主分类号 B24B49/02
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