发明名称 VITREOUS SILICA CRUCIBLE AND METHOD OF MANUFACTURING THE SAME
摘要 Provided is a vitreous silica crucible for pulling a silicon single crystal, having an inner surface layer which is excellent in uniformity and has a low bubble content rate, and a method of manufacturing the same. Provided is a method of manufacturing a vitreous silica crucible for pulling a silicon single crystal comprising the step of forming an inner surface layer 30 made of synthetic silica powder, wherein the inner surface layer 30 comprises an inner side portion 31 of the inner surface layer 30, the inner side portion 31 made of a first synthetic silica powder; and a surface side portion 32 of the inner surface layer 30, the surface side portion made of a second synthetic silica powder having a smaller average particle size than that of the first synthetic silica powder. The second synthetic silica powder to form the surface side portion 32 of the inner surface layer 30 has an average particle diameter which is smaller than that of the first synthetic silica powder to form the inner side portion 31 of the inner surface layer 30 by 10 μm or more.
申请公布号 US2011023773(A1) 申请公布日期 2011.02.03
申请号 US20090934837 申请日期 2009.03.23
申请人 JAPAN SUPER QUARTZ CORPORATION 发明人 HARADA KAZUHIRO;SATO TADAHIRO;SATO MASARU
分类号 C30B15/10;C03B19/09 主分类号 C30B15/10
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