| 摘要 |
A position measuring arrangement that includes a retroreflector, a light source generating a lightbeam and a scanning unit that receives the lightbeam and generates a partially-divergent lightbeam. The scanning unit includes a scanning mirror that is mounted so it can be deflected in a reproducible manner around two different rotating axes that cross each other in a center of the scanning mirror so that a grid-like scanning of a two-dimensional spatial area by the partially-divergent lightbeam, in relation to which the retroreflector is arranged, takes place over a plurality of scanning tracks. The position measuring arrangement further including an interferometric distance measuring unit that includes a beam splitter element that splits the lightbeam generated by the light source in such a way that split lightbeams pass through a reference arm and a measuring arm at least once in each direction. The interferometric distance measuring unit includes an opto-electronic detector unit, through which a detection of distance-dependent signals from superimposed lightbeams from the reference arm and the measuring arm takes place when, at a time of optical contact between the scanning unit and the retroreflector, a back reflection of the lightbeam from the retroreflector in a direction of the scanning unit results.
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